EINDHOVEN, Netherlands ” Philips Research scientists have made MEMS (microelectromechanical systems) capacitors that could be used to enhance the performance and reduce the size of RF circuits in ...
Developments in the field of semiconductors are leading to integrated circuits with three-dimensional features and even moving parts. Such devices, called microelectromechanical systems (MEMS), can ...
Some results have been hidden because they may be inaccessible to you
Show inaccessible results