BOULDER, Colo. — Researchers at the University of Colorado have boosted the output power and reduced the beam wavelength of their tabletop extreme ultraviolet (EUV) laser system built with ...
ST. CHARLES, Mo. — Raising the bar for next-generation lithography (NGL) sources, TRW Inc.'s Cutting Edge Optronics subsidiary here today demonstrated a 1500-watt laser module for an NGL technology ...
XLight raises $40 million to pursue new EUV light source for lithography machines China investing heavily in EUV technology development XLight's funding led by Playground Global, joined by several ...